US PATENT SUBCLASS 438 / 694
.~ Combined with coating step

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
694.~ Combined with coating step {5}
695  DF  .~.~> Simultaneous etching and coating
696  DF  .~.~> Coating of sidewall
697  DF  .~.~> Planarization by etching and coating {2}
700  DF  .~.~> Formation of groove or trench {2}
703  DF  .~.~> Plural coating steps

DEFINITION

Classification: 438/694

Combined with coating step:

(under subclass 689) Processes additionally having a step of depositing a material onto the semiconductive substrate.