US PATENT SUBCLASS 438 / 703
.~.~ Plural coating steps

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
694  DF  .~ Combined with coating step {5}
703.~.~ Plural coating steps

DEFINITION

Classification: 438/703

Plural coating steps:

(under subclass 694) Processes having multiple material deposition steps.