US PATENT SUBCLASS 438 / 695
.~.~ Simultaneous etching and coating

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
694  DF  .~ Combined with coating step {5}
695.~.~ Simultaneous etching and coating

DEFINITION

Classification: 438/695

Simultaneous etching and coating:

(under subclass 694) Processes wherein the chemical etching and material deposition occur concurrently.