US PATENT SUBCLASS 438 / 696
.~.~ Coating of sidewall

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
694  DF  .~ Combined with coating step {5}
696.~.~ Coating of sidewall

DEFINITION

Classification: 438/696

Coating of sidewall:

(under subclass 694) Processes wherein the chemical etching and material deposition is affected so that only vertically disposed surfaces remain coated with the deposited material.