US PATENT SUBCLASS 438 / 776
.~.~.~.~ Using electromagnetic or wave energy

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

758  DF  COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6}
765  DF  .~ By reaction with substrate {4}
769  DF  .~.~ Reaction with silicon semiconductive region (e.g., oxynitride formation, etc.) {2}
775  DF  .~.~.~ Nitridation {1}
776.~.~.~.~ Using electromagnetic or wave energy {1}
777  DF  .~.~.~.~.~> Microwave gas energizing

DEFINITION

Classification: 438/776

Using electromagnetic or wave energy:

(under subclass 775) Processes wherein the nitridation is conducted using irradiation of electromagnetic or wave energy.