US PATENT SUBCLASS 438 / 256
.~.~.~.~.~ Contacts formed by selective growth or deposition

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

142  DF  MAKING FIELD EFFECT DEVICE HAVING PAIR OF ACTIVE REGIONS SEPARATED BY GATE STRUCTURE BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {6}
197  DF  .~ Having insulated gate (e.g., IGFET, MISFET, MOSFET, etc.) {24}
238  DF  .~.~ Including passive device (e.g., resistor, capacitor, etc.) {1}
239  DF  .~.~.~ Capacitor {5}
253  DF  .~.~.~.~ Stacked capacitor {3}
256.~.~.~.~.~ Contacts formed by selective growth or deposition

DEFINITION

Classification: 438/256

Contacts formed by selective growth or deposition:

(under subclass 253) Process wherein electrical contacts are formed by selective growth or deposition of conductive material onto the semiconductor substrate.