438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
142 | DF | MAKING FIELD EFFECT DEVICE HAVING PAIR OF ACTIVE REGIONS SEPARATED BY GATE STRUCTURE BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {6} |
197 | DF | .~ Having insulated gate (e.g., IGFET, MISFET, MOSFET, etc.) {24} |
238 | DF | .~.~ Including passive device (e.g., resistor, capacitor, etc.) {1} |
239 | DF | .~.~.~ Capacitor {5} |
241 | .~.~.~.~ And additional field effect transistor (e.g., sense or access transistor, etc.) {1} | |
242 | DF | .~.~.~.~.~> Including transistor formed on trench sidewalls |