US PATENT SUBCLASS 438 / 771
.~.~.~.~ Using electromagnetic or wave energy

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

758  DF  COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6}
765  DF  .~ By reaction with substrate {4}
769  DF  .~.~ Reaction with silicon semiconductive region (e.g., oxynitride formation, etc.) {2}
770  DF  .~.~.~ Oxidation {3}
771.~.~.~.~ Using electromagnetic or wave energy {1}
772  DF  .~.~.~.~.~> Microwave gas energizing

DEFINITION

Classification: 438/771

Using electromagnetic or wave energy:

(under subclass 770) Processes wherein the oxidation is conducted using irradiation of electromagnetic or wave energy.