| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
| 57 | DF | .~ Responsive to electromagnetic radiation {22} |
| 73 | ![]() | .~.~ Making electromagnetic responsive array {3} |
| 74 | DF | .~.~.~> Vertically arranged (e.g., tandem, stacked, etc.) |
| 75 | DF | .~.~.~> Charge transfer device (e.g., CCD, etc.) {3} |
| 80 | DF | .~.~.~> Lateral series connected array {1} |