| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS | 
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} | 
| 57 | DF | .~ Responsive to electromagnetic radiation {22} | 
| 73 |  | .~.~ Making electromagnetic responsive array {3} | 
| 74 | DF | .~.~.~> Vertically arranged (e.g., tandem, stacked, etc.) | 
| 75 | DF | .~.~.~> Charge transfer device (e.g., CCD, etc.) {3} | 
| 80 | DF | .~.~.~> Lateral series connected array {1} |