| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
| 57 | DF | .~ Responsive to electromagnetic radiation {22} |
| 73 | DF | .~.~ Making electromagnetic responsive array {3} |
| 74 | ![]() | .~.~.~ Vertically arranged (e.g., tandem, stacked, etc.) |