438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
57 | DF | .~ Responsive to electromagnetic radiation {22} |
73 | DF | .~.~ Making electromagnetic responsive array {3} |
74 | .~.~.~ Vertically arranged (e.g., tandem, stacked, etc.) |