| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 48 | ![]() | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
| 49 | DF | .~> Chemically responsive |
| 50 | DF | .~> Physical stress responsive {3} |
| 54 | DF | .~> Thermally responsive {1} |
| 56 | DF | .~> Responsive to corpuscular radiation (e.g., nuclear particle detector, etc.) |
| 57 | DF | .~> Responsive to electromagnetic radiation {22} |