438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
48 | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} | |
49 | DF | .~> Chemically responsive |
50 | DF | .~> Physical stress responsive {3} |
54 | DF | .~> Thermally responsive {1} |
56 | DF | .~> Responsive to corpuscular radiation (e.g., nuclear particle detector, etc.) |
57 | DF | .~> Responsive to electromagnetic radiation {22} |