US PATENT SUBCLASS 438 / 50
.~ Physical stress responsive

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

48  DF  MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5}
50.~ Physical stress responsive {3}
51  DF  .~.~> Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor
52  DF  .~.~> Having cantilever element
53  DF  .~.~> Having diaphragm element

DEFINITION

Classification: 438/50

Physical stress responsive:

(under subclass 48) Process for making a semiconductor device or circuit responsive to physical deformation (e.g., pressure, strain, etc.)

(1) Note. Processes for making semiconductor electrical device based surface acoustic wave devices, accelerometers, and strain gages are proper for this subclass.

SEE OR SEARCH CLASS

73, Measuring and Testing, particularly

777, for a semiconductor-type stress/strain sensor, subclass 514.16 for a semiconductor-type accelerometer, and subclass 754 for semiconductor-type fluid pressure sensors.

257, Active Solid-State Devices (e.g., Transistors, Solid-State Diodes),

415+, for a solid-state active device responsive to physical deformation.

333, Wave Transmission Lines and Networks, 193+, for electromechanical filter using surface acoustic waves.

338, Electrical Resistors,

2, for electrical resistors of the strain gage type.