| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
| 50 | DF | .~ Physical stress responsive {3} |
| 51 | ![]() | .~.~ Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor |