US PATENT SUBCLASS 438 / 53
.~.~ Having diaphragm element

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

48  DF  MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5}
50  DF  .~ Physical stress responsive {3}
53.~.~ Having diaphragm element

DEFINITION

Classification: 438/53

Having diaphragm element:

(under subclass 50) Process for making a physical stress responsive device or circuit which has a thin deflectable membrane.

SEE OR SEARCH CLASS

216, Etching a Substrate: Processes,

2, for a process of making a diaphragm mechanical structure using semiconductive material wherein no electrical function is attributable to the structure produced.