| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
| 57 | DF | .~ Responsive to electromagnetic radiation {22} |
| 73 | DF | .~.~ Making electromagnetic responsive array {3} |
| 75 | ![]() | .~.~.~ Charge transfer device (e.g., CCD, etc.) {3} |
| 76 | DF | .~.~.~.~> Majority signal carrier (e.g., buried or bulk channel, peristaltic, etc.) |
| 77 | DF | .~.~.~.~> Compound semiconductor |
| 78 | DF | .~.~.~.~> Having structure to improve output signal (e.g., exposure control structure, etc.) {1} |