US PATENT SUBCLASS 438 / 724
.~.~.~.~ Silicon nitride

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
706  DF  .~ Vapor phase etching (i.e., dry etching) {3}
707  DF  .~.~ Utilizing electromagnetic or wave energy {3}
710  DF  .~.~.~ By creating electric field (e.g., plasma, glow discharge, etc.) {17}
724.~.~.~.~ Silicon nitride

DEFINITION

Classification: 438/724

Silicon nitride:

(under subclass 710) Process wherein the material undergoing etching with the energized gas is a compound of silicon and nitrogen.