US PATENT SUBCLASS 438 / 721
.~.~.~.~.~ Silicide

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
706  DF  .~ Vapor phase etching (i.e., dry etching) {3}
707  DF  .~.~ Utilizing electromagnetic or wave energy {3}
710  DF  .~.~.~ By creating electric field (e.g., plasma, glow discharge, etc.) {17}
720  DF  .~.~.~.~ Electrically conductive material (e.g., metal, conductive oxide, etc.) {1}
721.~.~.~.~.~ Silicide

DEFINITION

Classification: 438/721

Silicide:

(under subclass 720) Processes wherein the material undergoing etching with the energized gas is an electrically conductive compound of silicon and a metal atom.