US PATENT SUBCLASS 438 / 716
.~.~.~.~ With substrate handling (e.g., conveying, etc.)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
706  DF  .~ Vapor phase etching (i.e., dry etching) {3}
707  DF  .~.~ Utilizing electromagnetic or wave energy {3}
710  DF  .~.~.~ By creating electric field (e.g., plasma, glow discharge, etc.) {17}
716.~.~.~.~ With substrate handling (e.g., conveying, etc.)

DEFINITION

Classification: 438/716

With substrate handling (e.g., conveying, etc.):

(under subclass 710) Processes including the physical handling or manipulation of the semiconductor substrate in conjunction with the etching thereof.