US PATENT SUBCLASS 438 / 674
.~.~ Selective deposition of conductive layer

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
674.~.~ Selective deposition of conductive layer {3}
675  DF  .~.~.~> Plug formation (i.e., in viahole)
676  DF  .~.~.~> Utilizing electromagnetic or wave energy
677  DF  .~.~.~> Pretreatment of surface to enhance or retard deposition

DEFINITION

Classification: 438/674

Selective deposition of conductive layer:

(under subclass 597) Processes wherein the conductive material is deposited upon selected regions of the substrate.