US PATENT SUBCLASS 438 / 676
.~.~.~ Utilizing electromagnetic or wave energy

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
674  DF  .~.~ Selective deposition of conductive layer {3}
676.~.~.~ Utilizing electromagnetic or wave energy

DEFINITION

Classification: 438/676

Utilizing electromagnetic or wave energy:

(under subclass 674) Processes wherein the selective deposition is accomplished through the irradiation of localized regions of the substrate with electromagnetic or wave energy.