US PATENT SUBCLASS 438 / 677
.~.~.~ Pretreatment of surface to enhance or retard deposition

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
674  DF  .~.~ Selective deposition of conductive layer {3}
677.~.~.~ Pretreatment of surface to enhance or retard deposition

DEFINITION

Classification: 438/677

Pretreatment of surface to enhance or retard deposition:

(under subclass 674) Processes including a step of treating the substrate surface preparatory to the selective deposition step to increase or decrease the deposition thereon.