US PATENT SUBCLASS 438 / 565
.~.~ From vapor phase

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
565.~.~ From vapor phase {3}
566  DF  .~.~.~> Plural diffusion stages
567  DF  .~.~.~> Solid source in operative relation with semiconductor region {1}
569  DF  .~.~.~> Into compound semiconductor region

DEFINITION

Classification: 438/565

From vapor phase:

(under subclass 542) Processes wherein an electrically active impurity is produced using a gaseous substance as the dopant source material.