US PATENT SUBCLASS 438 / 569
.~.~.~ Into compound semiconductor region

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
565  DF  .~.~ From vapor phase {3}
569.~.~.~ Into compound semiconductor region

DEFINITION

Classification: 438/569

Into compound semiconductor region:

(under subclass 565) Process wherein an electrically active dopant is diffused into a compound semiconductor.