US PATENT SUBCLASS 438 / 566
.~.~.~ Plural diffusion stages

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
565  DF  .~.~ From vapor phase {3}
566.~.~.~ Plural diffusion stages

DEFINITION

Classification: 438/566

Plural diffusion stages:

(under subclass 565) Processes wherein the diffusion is carried out in multiple stages.