US PATENT SUBCLASS 438 / 567
.~.~.~ Solid source in operative relation with semiconductor region

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
565  DF  .~.~ From vapor phase {3}
567.~.~.~ Solid source in operative relation with semiconductor region {1}
568  DF  .~.~.~.~> In capsule-type enclosure

DEFINITION

Classification: 438/567

Solid source in operative relation with semiconductor region:

(under subclass 565) Processes wherein the dopant source material originates from a solid source in close proximity to the semiconductor region to be doped.