| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 510 | DF | INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7} |
| 542 | DF | .~ Diffusing a dopant {15} |
| 565 | DF | .~.~ From vapor phase {3} |
| 567 | DF | .~.~.~ Solid source in operative relation with semiconductor region {1} |
| 568 | | .~.~.~.~ In capsule-type enclosure |