US PATENT SUBCLASS 438 / 493
.~ Plural fluid growth steps with intervening diverse operation

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

478  DF  FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9}
493.~ Plural fluid growth steps with intervening diverse operation {3}
494  DF  .~.~> Differential etching
495  DF  .~.~> Doping of semiconductor
496  DF  .~.~> Coating of semiconductive substrate with nonsemiconductive material

DEFINITION

Classification: 438/493

Plural fluid growth steps with intervening diverse operation:

(under subclass 478) Process wherein multiple fluid growth steps having combined therewith at least one step not perfecting to either prior or subsequent growth steps and which step is preformed intermediate to the multiple fluid growth steps.

SEE OR SEARCH CLASS

117, Single-Crystal, Oriented-Crystal, and Epitaxy Growth Processes; Non-Coating Apparatus Therefor, appropriate subclasses for the process of single crystallization and perfecting steps therewith.