US PATENT SUBCLASS 438 / 494
.~.~ Differential etching

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

478  DF  FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9}
493  DF  .~ Plural fluid growth steps with intervening diverse operation {3}
494.~.~ Differential etching

DEFINITION

Classification: 438/494

Differential etching:

(under subclass 493) Process where the differential etching of the substrate intermediate to the steps of fluid growth of semiconductive material is the diverse step.