US PATENT SUBCLASS 438 / 495
.~.~ Doping of semiconductor

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

478  DF  FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9}
493  DF  .~ Plural fluid growth steps with intervening diverse operation {3}
495.~.~ Doping of semiconductor

DEFINITION

Classification: 438/495

Doping of semiconductor:

(under subclass 493) Process wherein the incorporation of an electrically active dopant species into a semiconductive region of the substrate intermediate to the steps of fluid growth of semiconductive material is the diverse step.