438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
478 | DF | FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9} |
493 | DF | .~ Plural fluid growth steps with intervening diverse operation {3} |
496 | .~.~ Coating of semiconductive substrate with nonsemiconductive material |