438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
400 | DF | FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10} |
414 | .~ Isolation by PN junction only {3} | |
415 | DF | .~.~> Thermomigration |
416 | DF | .~.~> With epitaxial semiconductor formation {2} |
420 | DF | .~.~> Plural doping steps |