US PATENT SUBCLASS 438 / 415
.~.~ Thermomigration

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
414  DF  .~ Isolation by PN junction only {3}
415.~.~ Thermomigration

DEFINITION

Classification: 438/415

Thermomigration:

(under subclass 414) Process for making junction isolated laterally spaced semiconductor regions having a step of dopant migration under the influence of a temperature gradient.