438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
400 | DF | FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10} |
414 | DF | .~ Isolation by PN junction only {3} |
416 | .~.~ With epitaxial semiconductor formation {2} | |
417 | DF | .~.~.~> And simultaneous polycrystalline growth |
418 | DF | .~.~.~> Dopant addition {1} |