438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
400 | DF | FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10} |
414 | DF | .~ Isolation by PN junction only {3} |
416 | DF | .~.~ With epitaxial semiconductor formation {2} |
417 | .~.~.~ And simultaneous polycrystalline growth |