| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 400 | DF | FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10} |
| 414 | DF | .~ Isolation by PN junction only {3} |
| 416 | DF | .~.~ With epitaxial semiconductor formation {2} |
| 417 | ![]() | .~.~.~ And simultaneous polycrystalline growth |