438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
309 | DF | FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {25} |
353 | .~ Including isolation structure {5} | |
354 | DF | .~.~> Having semi-insulative region |
355 | DF | .~.~> Total dielectrical isolation |
356 | DF | .~.~> Isolation by PN junction only {1} |
359 | DF | .~.~> Dielectric isolation formed by grooving and refilling with dielectrical material {2} |
362 | DF | .~.~> Recessed oxide by localized oxidation (i.e., LOCOS) {1} |