438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
309 | DF | FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {25} |
335 | .~ Forming lateral transistor structure {4} | |
336 | DF | .~.~> Combined with vertical bipolar transistor |
337 | DF | .~.~> Active region formed along groove or exposed edge in semiconductor |
338 | DF | .~.~> Having multiple emitter or collector structure |
339 | DF | .~.~> Self-aligned |