US PATENT SUBCLASS 414 / 935
ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING

Current as of: June, 1999
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414 /   HD   MATERIAL OR ARTICLE HANDLING

935ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING {5}
936  DF  .~> Including wafer orienting means
937  DF  .~> Including means for charging or discharging wafer cassette {1}
939  DF  .~> Including wafer charging or discharging means for vacuum chamber
940  DF  .~> Wafer cassette transporting
941  DF  .~> Includes means for gripping wafer

DEFINITION

Classification: 414/935

ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING:

A collection of art disclosing useful subject matter utilized in the handling of flat, sheetlike semiconductor wafers.