US PATENT SUBCLASS 414 / 937
.~ Including means for charging or discharging wafer cassette

Current as of: June, 1999
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414 /   HD   MATERIAL OR ARTICLE HANDLING

935  DF  ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING {5}
937.~ Including means for charging or discharging wafer cassette {1}
938  DF  .~.~> Wafers positioned vertically within cassette

DEFINITION

Classification: 414/937

Including means for charging or discharging wafer cassette:

(under subclass 935) A collection of art including means used in charging or discharging a wafer into a portable rack having distinct supporting elements for plural wafers.