US PATENT SUBCLASS 414 / 938
.~.~ Wafers positioned vertically within cassette

Current as of: June, 1999
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414 /   HD   MATERIAL OR ARTICLE HANDLING

935  DF  ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING {5}
937  DF  .~ Including means for charging or discharging wafer cassette {1}
938.~.~ Wafers positioned vertically within cassette

DEFINITION

Classification: 414/938

Wafers positioned vertically within cassette:

(under subclass 937) A collection of art wherein the wafer is placed into a rack which has its supporting elements arranged in a manner that maintains the planar surface of the wafer in a vertical attitude.