US PATENT SUBCLASS 414 / 940
.~ Wafer cassette transporting

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


414 /   HD   MATERIAL OR ARTICLE HANDLING

935  DF  ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING {5}
940.~ Wafer cassette transporting

DEFINITION

Classification: 414/940

Wafer cassette transporting:

(under subclass 935) A collection of art for bodily moving a portable rack which has distinct elements for supporting plural wafers (e.g., furnace charging, etc.).