US PATENT SUBCLASS 414 / 939
.~ Including wafer charging or discharging means for vacuum chamber

Current as of: June, 1999
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414 /   HD   MATERIAL OR ARTICLE HANDLING

935  DF  ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING {5}
939.~ Including wafer charging or discharging means for vacuum chamber

DEFINITION

Classification: 414/939

Including wafer charging or discharging means for vacuum chamber:

(under subclass 935) A collection of art including means for charging or discharging one or more wafers to or from areas having different pres-sures, one of which areas operates in a vacuum condition.