US PATENT SUBCLASS 414 / 936
.~ Including wafer orienting means
Current as of:
June, 1999
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414 /
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MATERIAL OR ARTICLE HANDLING
935
DF
ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING
{5}
936
.~ Including wafer orienting means
DEFINITION
Classification: 414/936
Including wafer orienting means:
(under subclass 935) A collection of art including means the sole function of which is to move a wafer or group of wafers to effect a change in the orientation thereof (e.g., to align a wafer flat, etc.).