US PATENT SUBCLASS 204 / 298.22
.~.~.~.~.~.~ Moving magnetic field or target

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.02  DF  .~.~ Coating {13}
298.16  DF  .~.~.~ Magnetically enchanced {1}
298.17  DF  .~.~.~.~ Flux passes through target surface {3}
298.21  DF  .~.~.~.~.~ Cylindrical or curved magnetron target {1}
298.22.~.~.~.~.~.~ Moving magnetic field or target

DEFINITION

Classification: 204/298.22

Moving magnetic field or target:

(under subclass 298.21) Apparatus including means for mechanically moving or electrically shifting the magnetic enhancement means or lines of magnetic flux, or the sputtering surface, relative to each other.