US PATENT SUBCLASS 204 / 298.17
.~.~.~.~ Flux passes through target surface

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.02  DF  .~.~ Coating {13}
298.16  DF  .~.~.~ Magnetically enchanced {1}
298.17.~.~.~.~ Flux passes through target surface {3}
298.18  DF  .~.~.~.~.~> Focusing target (e.g., conical target, plural inclined targets, etc.)
298.19  DF  .~.~.~.~.~> Planar magnetron {1}
298.21  DF  .~.~.~.~.~> Cylindrical or curved magnetron target {1}

DEFINITION

Classification: 204/298.17

Flux passes through target surface:

(under subclass 298.16) Apparatus including means to allow the flux to pass through a target surface.