204 / | HD | CHEMISTRY: ELECTRICAL AND WAVE ENERGY |
|
* | DD | PROCESSES AND PRODUCTS {7} |
192.1 | DF | .~ Coating, forming or etching by sputtering {3} |
192.12 | DF | .~.~ Glow discharge sputter deposition (e.g., cathode sputtering, etc.) {3} |
192.15 | | .~.~.~ Specified deposition material or use {10} |
192.16 | DF | .~.~.~.~> Wear or abrasion resistant |
192.17 | DF | .~.~.~.~> Electrical contact material |
192.18 | DF | .~.~.~.~> Piezoelectric |
192.2 | DF | .~.~.~.~> Ferromagnetic |
192.21 | DF | .~.~.~.~> Resistor |
192.22 | DF | .~.~.~.~> Insulator or dielectric {1} |
192.24 | DF | .~.~.~.~> Superconductor |
192.25 | DF | .~.~.~.~> Semiconductor |
192.26 | DF | .~.~.~.~> Optical or photoactive {3} |
192.3 | DF | .~.~.~.~> With sputter etching |