US PATENT SUBCLASS 204 / 192.18
.~.~.~.~ Piezoelectric

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

*  DD  PROCESSES AND PRODUCTS {7}
192.1  DF  .~ Coating, forming or etching by sputtering {3}
192.12  DF  .~.~ Glow discharge sputter deposition (e.g., cathode sputtering, etc.) {3}
192.15  DF  .~.~.~ Specified deposition material or use {10}
192.18.~.~.~.~ Piezoelectric

DEFINITION

Classification: 204/192.18

(under subclass 192.15) Process wherein the material exhibits piezoelectric properties (e.g., conversion of applied voltage to physical motion).

(1) Note. This subclass includes ferroelectic materials, i.e., wherein the coating is characterized by spontaneous

electric polarization the direction of which can be altered by an electric field. These materials are dielectric analogs of ferromagnetic materials.