US PATENT SUBCLASS 204 / 192.25
.~.~.~.~ Semiconductor

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

*  DD  PROCESSES AND PRODUCTS {7}
192.1  DF  .~ Coating, forming or etching by sputtering {3}
192.12  DF  .~.~ Glow discharge sputter deposition (e.g., cathode sputtering, etc.) {3}
192.15  DF  .~.~.~ Specified deposition material or use {10}
192.25.~.~.~.~ Semiconductor

DEFINITION

Classification: 204/192.25

Semiconductor:

(under subclass 192.15) Processes wherein the material is a semiconductor.

SEE OR SEARCH CLASS

438, Semiconductor Device Manufacturing: Process, for (a) combined processes and (b) certain unit operations of manufacturing a semiconductive substrate or device.