438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 301 | DF | .~ Diffusing a dopant (437/141) {17} |
FOR 325 | DF | .~.~ From vapor phase (437/165) {3} |
FOR 328 | DF | .~.~.~ Solid source is operative relation with semiconductor material (437/168) {1} |
FOR 329 | .~.~.~.~ In capsule type enclosure (437/169) |