438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
|
FOR 149 | | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 150 | DF | .~> Using energy beam to introduce dopant or modify dopant distribution (437/ 16) {5} |
FOR 211 | DF | .~> Making assemblies of plural individual devices having community feature, e.g., integrated circuit, electrical connection, etc. (437/51) {3} |
FOR 221 | DF | .~> Including isolation step (437/61) {4} |
FOR 240 | DF | .~> Shadow masking (437/80) |
FOR 241 | DF | .~> Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
FOR 294 | DF | .~> By fusing dopant with substrate, e.g., alloying, etc. (437/134) {6} |
FOR 301 | DF | .~> Diffusing a dopant (437/141) {17} |