US PATENT SUBCLASS 438 / FOR 328
.~.~.~ Solid source is operative relation with semiconductor material (437/168)


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 149  DF  INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7}
FOR 301  DF  .~ Diffusing a dopant (437/141) {17}
FOR 325  DF  .~.~ From vapor phase (437/165) {3}
FOR 328.~.~.~ Solid source is operative relation with semiconductor material (437/168) {1}
FOR 329  DF  .~.~.~.~> In capsule type enclosure (437/169)


DEFINITION

Classification: 438/FOR.328

Solid source is operative relation with semiconductor material:

Foreign art collection for processes wherein the dopant source material is in close proximity with the semiconductor material.